ISO 13424:2013 Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

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ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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Status: Active ChangeNumber: 1 InternationalClassificationCodeOfStandards: 71.040.40 TechnicalCommittee: ISO/TC 201/SC 7 ActivatedDate: 17.06.2021 PagesCount: 46 Language: en

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